CEM-System Liquid Delivery System with Vapour Control
 
The CEM-System (Controlled Evaporation and Mixing) is an innovative Liquid Delivery System (LDS) that can be applied for atmospheric or vacuum processes. It consists of a liquid flow controller, an MFC for carrier gas and a temperature controlled mixing and evaporation device. The system is suitable for mixing liquid flows of 0,25-1000 g/h resulting in saturated vapour flows of 5 mln/min up to 20 ln/min. This vaporizer system can replace bubblers. New opportunities created with the CEM-system: mixtures can be evaporated and even solids, dissolved in solvents can be vaporised successfully.
 




 


The process is fast, accurate, highly repeatable and efficient.


Features                                                     
  • Accurately controlled gas/liquid mixture (mass flow)
  • Fast response
  • High reproducibility
  • Handles water, solvents, liquid mixtures
  • Very stable vapour flow
  • Flexible selection of gas/liquid ratio
  • Lower working temperature than conventional system
 
Applications
  • CVD (Chemical Vapour Deposition), e.g. for hardening or planarization processes
  • Testing/calibration of analyzers with reference gas vapor concentrations
  • Toxic gas effects on protective clothing
  • Analyzers with reference H2O vapour concentrations
  • Humidification of fuels
  • Anaesthetics
 Data Sheet